Comment gasonics SNF 2011-10-01 15:33:11: Load arm not fully up

sgchong at snf.stanford.edu sgchong at snf.stanford.edu
Sat Oct 1 15:33:11 PDT 2011


I got the error message, "load arm not fully up" for every wafer.  Pressing start to resume solves the problem.




More information about the gasonics-pcs mailing list