Problem gasonics SNF 2011-10-02 18:45:09: load arm not fully up errors

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Oct 2 18:45:10 PDT 2011


received this error on 10 of 10 wafers.  retrying worked every time, but the intial try mostly sounds like some light hissing and the load arm not going anywhere.  
I also think the system is venting properly as it seems to be pulling the seal free on every unload.  there is a distinct popping sound of the chamber venting when the door finally breaks free.




More information about the gasonics-pcs mailing list