Problem gasonics SNF 2011-10-02 18:45:09: load arm not fully up errors
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Oct 3 14:52:15 PDT 2011
For now I adjusted the input air to 60psi to speed up the
load arm out travel. Will order a replacement bimba cylinder
asap. cycled wafers w/out hang up.
More information about the gasonics-pcs
mailing list