Problem gasonics SNF 2011-10-17 11:00:57: load unload arms not going full up down

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Oct 17 14:16:34 PDT 2011


Removed load big up plunger and cleaned, cycled wafer from
load to receiver with out   Will order a replacement plunger.




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