Problem gasonics SNF 2011-10-31 20:16:34: Gasonic chamber should be cleaned

lupin000 at snf.stanford.edu lupin000 at snf.stanford.edu
Mon Oct 31 20:16:34 PDT 2011


I noticed some particles(Si or PR) on my wafers after using Gasonics. Besides, the cassettes used in Gasonics are also partially covered with those particles. I think the inside of chamber is not properly vented so that the small particles are generated.




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