From cfchiang at snf.stanford.edu Fri Sep 16 12:13:39 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 16 Sep 2011 12:13:39 -0700 Subject: Problem gasonics SNF 2011-09-16 12:13:39: handling issue Message-ID: sender arm did not sense the wafer properly. move the wafer toward the arm a little helped but would run the risk of releasing the wafer on the processing frame (the 3 supports) off-centered. From eenriquez at snf.stanford.edu Fri Sep 16 14:43:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Sep 2011 14:43:47 -0700 Subject: Problem gasonics SNF 2011-09-16 12:13:39: handling issue Message-ID: No problem found. Cycled 6 wafers with no problems. From wangss at snf.stanford.edu Mon Sep 19 14:55:01 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Mon, 19 Sep 2011 14:55:01 -0700 Subject: Problem gasonics SNF 2011-09-19 14:55:01: Loading lift has difficulty to pick up wafers Message-ID: From barlian at snf.stanford.edu Mon Sep 19 17:03:20 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 19 Sep 2011 17:03:20 -0700 Subject: Problem gasonics SNF 2011-09-19 17:03:19: the loading arm mispositions wafers Message-ID: the arm mispositions wafers during loading, therefore it's having problem picking up wafers during unloading From eenriquez at snf.stanford.edu Tue Sep 20 10:17:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:17:28 -0700 Subject: Problem gasonics SNF 2011-09-19 17:03:19: the loading arm mispositions wafers Message-ID: Cleaned the loading arm. Cycled 50 wafers with no problems. From eenriquez at snf.stanford.edu Tue Sep 20 10:17:33 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:17:33 -0700 Subject: Problem gasonics SNF 2011-09-19 14:55:01: Loading lift has difficulty to pick up wafers Message-ID: Cleaned the loading arm. Cycled 50 wafers with no problems. From eenriquez at snf.stanford.edu Tue Sep 20 10:17:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:17:39 -0700 Subject: Comment gasonics SNF 2011-08-01 07:30:26: cleared problem Message-ID: Archived From barlian at snf.stanford.edu Thu Sep 22 16:30:54 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Thu, 22 Sep 2011 16:30:54 -0700 Subject: Problem gasonics SNF 2011-09-22 16:30:54: wafer piece broken inside the chamber Message-ID: Could you please recover this piece for me? Thank you much! From cbaxter at snf.stanford.edu Thu Sep 22 16:45:01 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 22 Sep 2011 16:45:01 -0700 Subject: Problem gasonics SNF 2011-09-22 16:30:54: wafer piece broken inside the chamber Message-ID: Recovered broken wafer inside the chamber. Wiped down chamber with ipa and also verfied wafer handler.. From eenriquez at snf.stanford.edu Wed Sep 28 10:00:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Sep 2011 10:00:01 -0700 Subject: Shutdown gasonics SNF 2011-09-28 10:00:01: Moving to a new location Message-ID: System will be ready by 9/30 From eenriquez at snf.stanford.edu Fri Sep 30 13:12:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Sep 2011 13:12:57 -0700 Subject: Comment gasonics SNF 2011-09-30 13:12:57: ready for qual Message-ID: Completed tool move and cycled several wafers From eenriquez at snf.stanford.edu Fri Sep 30 14:16:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Sep 2011 14:16:55 -0700 Subject: Shutdown gasonics SNF 2011-09-28 10:00:01: Moving to a new location Message-ID: Completed equipment move. Cycled several wafers with no problems. Ran 4 wafers coated with 1 um resist using recipe 13. All wafers completely cleared.