Problem gasonics SNF 2012-04-24 00:18:11: Wafer gets stuck with receiving arm

eperalta at snf.stanford.edu eperalta at snf.stanford.edu
Tue Apr 24 00:18:11 PDT 2012


There seems to be something wrong with the way the receiving arm collects the wafer after processing is done. As the arm slides under the wafer, it bumps the wafer slightly, lifting it from the 3-prong holding piece slightly and the arm is not able to suck onto the wafer. This happened 4 times with my batch of 6 fused silica wafers




More information about the gasonics-pcs mailing list