Comment gasonics SNF 2012-04-24 11:55:07: Wafer handling error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Apr 24 14:38:17 PDT 2012
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Comment gasonics SNF 2012-04-24 11:55:07: Wafer handling error
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adjusted the unload arm and cycled wafers.
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Comment gasonics SNF 2012-04-24 11:55:07: Wafer handling error
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Problem gasonics SNF 2012-04-26 11:21:26: vacume problem
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