Problem gasonics SNF 2012-04-30 11:09:35: Wafer transfer failure during unloading

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Mon Apr 30 11:09:35 PDT 2012


This problem occurs from time to time. It comes from the bad contact (vacuum failure) between wafer and unloading transfer arm. 




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