From xuanwu at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-08-17 16:33:19: no vacuum? Message-ID: <3950266.172.1345246400890.JavaMail.coral@shine> Loading arm couldn't pick up wafer. Seems like a vacuum problem. From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-08-17 16:33:19: no vacuum? Message-ID: <2399429.186.1345250518732.JavaMail.coral@shine> System back to normal operation.. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Comment gasonics SNF 2012-07-23 09:42:30: Plasma failure at 65 seconds and 125 seconds Message-ID: <26297355.72.1349965754727.JavaMail.coral@shine> archived From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Shutdown gasonics SNF 2012-11-02 17:08:06: Monthly PM Message-ID: <324202.218.1351901286879.JavaMail.coral@shine> Shutdown for Monthly pm... From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Shutdown gasonics SNF 2012-11-02 17:08:06: Monthly PM Message-ID: <27534862.220.1351905556843.JavaMail.coral@shine> Completed monthly pm check.. From bchui at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-04 16:53:10: exit arm misaligned Message-ID: <19792917.5.1352076791247.JavaMail.coral@shine> such that it brushes against the bottom of the completed wafer and knocks it off-kilter; with the result that the exit-arm vacuum sense fails and the process errors out. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-04 16:53:10: exit arm misaligned Message-ID: <1626761.16.1352134294393.JavaMail.coral@shine> No problem found. Ran 20 wafers with no problems. From bchui at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Comment gasonics SNF 2012-11-05 17:50:11: Exit arm still causing problems. Message-ID: <16126294.37.1352166612137.JavaMail.coral@shine> I align my flats facing right; maybe the interference only occurs then. I can demonstrate the problem next time staff is around. From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Comment gasonics SNF 2012-11-05 17:50:11: Exit arm still causing problems. Message-ID: <17482375.34.1352248708578.JavaMail.coral@shine> Made a minor adjustment on unload arm.. From eldwin at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-09 23:31:34: unload arm misaligned Message-ID: <21610795.38.1352532695049.JavaMail.coral@shine> unload arm pushes the wafer off-center when moving to pick up the wafer. the wafer sits tilted and arm is hence unable to pick it up and the wafer then needs manual adjustment before it can be picked up. looks like the same as the previous problem submitted a few days ago. From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-09 23:31:34: unload arm misaligned Message-ID: <30851954.43.1352592834797.JavaMail.coral@shine> The alignment is fine, the problem was with the big up for the unload arm acutator plunger (sticking). I removed the big up plunger and cleaned it ipa and lube it with halocarbon grease, test plunger using the manual command on the diagnostic mode. Installed plunger back and ran cycle tool on diagnostic mode w/out problem. From gyama at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-29 13:32:14: wafer pick-up arm jumping Message-ID: <4738861.40.1354224734541.JavaMail.coral@shine> wafer is not centered & process stops From lofaolain at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Comment gasonics SNF 2012-11-30 15:47:32: Worked okay for 2 wafers Message-ID: <12209081.17.1354319253134.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-11-29 13:32:14: wafer pick-up arm jumping Message-ID: <6405600.20.1354326347381.JavaMail.coral@shine> The unload arm big plunger valve is sticking, removed valve cleaned with ipa. Excerise valve at manual mode and it working fine for now. Will order a new valve. From mtan at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-12-13 08:05:01: polymer residue left over by carrier Message-ID: <18805735.20.1355414702158.JavaMail.coral@shine> the carrier needs to be cleaned. It leaves residues on the back of the wafer. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-12-13 08:05:01: polymer residue left over by carrier Message-ID: <19194417.21.1355513038431.JavaMail.coral@shine> Cleaned cassettes, chamber and the wafer loader. From bchui at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Comment gasonics SNF 2012-12-17 17:37:20: Output cassette sometimes skips a slot Message-ID: <3529206.68.1355794640467.JavaMail.coral@shine> i.e. rises two slots instead of one after accepting a processed wafer (happens about 1/5 of the time). The ramification is, if you run a full cassette of wafers you'll run out of slots at the output end. Suggest dividing the lot into two. From lofaolain at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-12-19 11:29:29: Contamination on output cassette Message-ID: <14534444.27.1355945369854.JavaMail.coral@shine> Silicon fragments? From eenriquez at snf.stanford.edu Sun Dec 23 08:55:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:30 -0000 Subject: Problem gasonics SNF 2012-12-19 11:29:29: Contamination on output cassette Message-ID: <20241973.37.1355966950511.JavaMail.coral@shine> Cleaned output cassette