Problem gasonics SNF 2012-11-04 16:53:10: exit arm misaligned

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Dec 23 08:55:30 PST 2012


such that it brushes against the bottom of the completed wafer and knocks it off-kilter; with the result that the exit-arm vacuum sense fails and the process errors out.



More information about the gasonics-pcs mailing list