Problem gasonics SNF 2012-11-09 23:31:34: unload arm misaligned

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Sun Dec 23 08:55:30 PST 2012


unload arm pushes the wafer off-center when moving to pick up the wafer. the wafer sits tilted and arm is hence unable to pick it up and the wafer then needs manual adjustment before it can be picked up. looks like the same as the previous problem submitted a few days ago.



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