Problem gasonics SNF 2012-11-29 13:32:14: wafer pick-up arm jumping

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Dec 23 08:55:30 PST 2012


The unload arm big plunger valve is sticking, removed
valve cleaned with ipa. Excerise valve at manual mode and it working
fine for now. Will order a new valve.



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