Comment gasonics SNF 2012-12-17 17:37:20: Output cassette sometimes skips a slot

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Dec 23 08:55:30 PST 2012


i.e. rises two slots instead of one after accepting a processed wafer (happens about 1/5 of the time).  The ramification is, if you run a full cassette of wafers you'll run out of slots at the output end.  Suggest dividing the lot into two.



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