From latta at snf.stanford.edu  Tue Feb 14 15:28:53 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:28:53 -0800
Subject: Shutdown gasonics SNF 2011-12-14 14:10:29: sheduled shutdown
Message-ID: <mailman.833.1356281737.3883.gasonics-pcs@snf.stanford.edu>

shutdown done, ran system, looks good



From latta at snf.stanford.edu  Tue Feb 14 15:29:46 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:29:46 -0800
Subject: Problem gasonics SNF 2012-02-14 15:29:45: Ran 8 wfs through recipe 013
Message-ID: <mailman.834.1356281737.3883.gasonics-pcs@snf.stanford.edu>

1.6 3612 resist plasma etched.  All look clean.



From latta at snf.stanford.edu  Tue Feb 14 15:30:09 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:30:09 -0800
Subject: Problem gasonics SNF 2012-02-14 15:29:45: Ran 8 wfs through recipe 013
Message-ID: <mailman.835.1356281737.3883.gasonics-pcs@snf.stanford.edu>

opppps meant as comment



From latta at snf.stanford.edu  Tue Feb 14 15:30:48 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:30:48 -0800
Subject: Problem gasonics SNF 2012-02-14 15:30:47: Ran 8 wfs through recipe 013
Message-ID: <mailman.836.1356281737.3883.gasonics-pcs@snf.stanford.edu>

1.6 3612 resist plasma etched.  All look clean.



From latta at snf.stanford.edu  Tue Feb 14 15:31:11 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:31:11 -0800
Subject: Comment gasonics SNF 2012-02-14 15:31:10: test
Message-ID: <mailman.837.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Tue Feb 14 15:31:35 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:31:35 -0800
Subject: Problem gasonics SNF 2012-02-14 15:30:47: Ran 8 wfs through recipe 013
Message-ID: <mailman.838.1356281737.3883.gasonics-pcs@snf.stanford.edu>

again?!



From latta at snf.stanford.edu  Tue Feb 14 15:31:42 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:31:42 -0800
Subject: Comment gasonics SNF 2012-02-14 15:31:10: test
Message-ID: <mailman.839.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Tue Feb 14 15:32:11 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 15:32:11 -0800
Subject: Comment gasonics SNF 2012-02-14 15:32:10: Ran 8 wfs through using recipe 013
Message-ID: <mailman.840.1356281737.3883.gasonics-pcs@snf.stanford.edu>

1.6 3612 resist plasma etched.  All look clean.