From latta at snf.stanford.edu Wed Jul 18 12:56:52 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 12:56:52 -0700 Subject: Comment gasonics SNF 2012-04-19 22:16:15: State Message-ID: archived From latta at snf.stanford.edu Wed Jul 18 12:57:07 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 12:57:07 -0700 Subject: Comment gasonics SNF 2012-03-28 10:47:31: Completed monthly pm Message-ID: archived From latta at snf.stanford.edu Wed Jul 18 12:57:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 12:57:24 -0700 Subject: Comment gasonics SNF 2012-02-14 15:32:10: Ran 8 wfs through using recipe 013 Message-ID: archived From latta at snf.stanford.edu Wed Jul 18 12:57:45 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 12:57:45 -0700 Subject: Comment gasonics SNF 2011-12-08 17:01:40: Plasma detector Message-ID: archived From leixin at snf.stanford.edu Sat Jul 21 11:46:29 2012 From: leixin at snf.stanford.edu (leixin at snf.stanford.edu) Date: Sat, 21 Jul 2012 11:46:29 -0700 Subject: Problem gasonics SNF 2012-07-21 11:46:28: plasma failure Message-ID: There was "plasma failure" when I ran multiple wafers. It worked fine with one wafer input. From cbaxter at snf.stanford.edu Sun Jul 22 19:11:17 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Jul 2012 19:11:17 -0700 Subject: Problem gasonics SNF 2012-07-21 11:46:28: plasma failure Message-ID: Process 1 and 2 are ok, process 3 matching is out of phase. Adjusted tuned matching network from 100 to 500 watts. From sclaussen at snf.stanford.edu Mon Jul 23 09:29:00 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 23 Jul 2012 09:29:00 -0700 Subject: Problem gasonics SNF 2012-07-23 09:29:00: Plasma failure Message-ID: After initial 30 second warmup step, I got the error "Plasma failure." I hit Start for "Resume Recipe," and it loaded the wafer and began processing. I got the same error 65 seconds into processing (Recipe 044), and again hit Start. It happened a few more times during the recipe. From sclaussen at snf.stanford.edu Mon Jul 23 09:42:31 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 23 Jul 2012 09:42:31 -0700 Subject: Comment gasonics SNF 2012-07-23 09:42:30: Plasma failure at 65 seconds and 125 seconds Message-ID: Recipe 044 errored out at these points in all 5 of my wafers. From cbaxter at snf.stanford.edu Mon Jul 23 11:45:48 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jul 2012 11:45:48 -0700 Subject: Problem gasonics SNF 2012-07-23 09:29:00: Plasma failure Message-ID: Removed the plasma detector sensor and clean photo diode ipa. Cycled tool using recipe 014.. From jsegal at snf.stanford.edu Tue Jul 24 16:37:12 2012 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Tue, 24 Jul 2012 16:37:12 -0700 Subject: Problem gasonics SNF 2012-07-24 16:37:12: handling problem Message-ID: could not detect wafer for transfer to output cassette, I removed wafer manuallybut system is "stuck" in mode of trying to transfer wafer. From mdickey at snf.stanford.edu Wed Jul 25 08:21:11 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 25 Jul 2012 08:21:11 -0700 Subject: Problem gasonics SNF 2012-07-24 16:37:12: handling problem Message-ID: ran 26 wafers without any handling problems. Could not duplicate the problem