Problem gasonics SNF 2012-07-23 09:29:00: Plasma failure

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Mon Jul 23 09:29:00 PDT 2012


After initial 30 second warmup step, I got the error "Plasma failure." I hit Start for "Resume Recipe," and it loaded the wafer and began processing. I got the same error 65 seconds into processing (Recipe 044), and again hit Start. It happened a few more times during the recipe.




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