Problem gasonics SNF 2012-07-24 16:37:12: handling problem

jsegal at snf.stanford.edu jsegal at snf.stanford.edu
Tue Jul 24 16:37:12 PDT 2012


could not detect wafer for transfer to output cassette, I removed wafer manuallybut system is "stuck" in mode of trying to transfer wafer. 




More information about the gasonics-pcs mailing list