From eenriquez at snf.stanford.edu  Mon Mar  5 09:17:50 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 5 Mar 2012 09:17:50 -0800
Subject: Shutdown gasonics SNF 2012-03-05 09:17:49: Cooling water
Message-ID: <mailman.841.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Mar  5 12:37:42 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 5 Mar 2012 12:37:42 -0800
Subject: Shutdown gasonics SNF 2012-03-05 09:17:49: Cooling water
Message-ID: <mailman.842.1356281737.3883.gasonics-pcs@snf.stanford.edu>

PCW is OK



From eenriquez at snf.stanford.edu  Wed Mar 28 10:47:31 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 28 Mar 2012 10:47:31 -0700
Subject: Comment gasonics SNF 2012-03-28 10:47:31: Completed monthly pm
Message-ID: <mailman.843.1356281737.3883.gasonics-pcs@snf.stanford.edu>




From xuanwu at snf.stanford.edu  Sat Mar 31 12:34:05 2012
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Sat, 31 Mar 2012 12:34:05 -0700
Subject: Problem gasonics SNF 2012-03-31 12:34:05: unload arm
Message-ID: <mailman.844.1356281737.3883.gasonics-pcs@snf.stanford.edu>

unload arm sometimes isn't able to pick up a wafer; perhaps misalignment of planes? happened to me twice in the last week.