From cbaxter at snf.stanford.edu  Tue May  1 15:53:57 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 1 May 2012 15:53:57 -0700
Subject: Problem gasonics SNF 2012-04-30 11:09:35: Wafer transfer failure during unloading
Message-ID: <mailman.854.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Adjusted unload arm small up..



From cbaxter at snf.stanford.edu  Thu May  3 22:20:10 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 3 May 2012 22:20:10 -0700
Subject: Problem gasonics SNF 2012-05-03 13:23:12: plasma failed
Message-ID: <mailman.855.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Found the tool power off  (second time with in 30days).
Power on the tool and found wafer inside the chamber,
had to removed the top lid to get the wafer out. I cleaned the
plasma detector photo diode (plasma failure problem)
and cycled wafer using 123 recipe.



From dongrip at snf.stanford.edu  Tue May  8 01:11:03 2012
From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu)
Date: Tue, 8 May 2012 01:11:03 -0700
Subject: Problem gasonics SNF 2012-05-08 01:11:02: unloading arm is too high?
Message-ID: <mailman.856.1356281737.3883.gasonics-pcs@snf.stanford.edu>

unloading arm always hits the wafer so that it makes failures to unload the processed wafer. 



From eenriquez at snf.stanford.edu  Tue May  8 07:33:12 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 8 May 2012 07:33:12 -0700
Subject: Problem gasonics SNF 2012-05-08 01:11:02: unloading arm is too high?
Message-ID: <mailman.857.1356281737.3883.gasonics-pcs@snf.stanford.edu>

The unload arm was stuck in the partially up position.  Lubricated the arm and cycled 50 wafers.



From cbaxter at snf.stanford.edu  Thu May 17 14:40:20 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 17 May 2012 14:40:20 -0700
Subject: Problem gasonics SNF 2012-05-15 23:54:25: unable to load wafter
Message-ID: <mailman.858.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Adjusted unload arm small up...



From bchui at snf.stanford.edu  Sat May 26 01:10:54 2012
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Sat, 26 May 2012 01:10:54 -0700
Subject: Problem gasonics SNF 2012-05-26 01:10:53: unload arm misaligned
Message-ID: <mailman.859.1356281737.3883.gasonics-pcs@snf.stanford.edu>

sometimes scrapes the underside of the finished wafer (thus knocking the wafer slightly aside) as it tries to move into place to unload it from the three-point perch.



From cbaxter at snf.stanford.edu  Sun May 27 10:40:55 2012
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sun, 27 May 2012 10:40:55 -0700
Subject: Problem gasonics SNF 2012-05-26 01:10:53: unload arm misaligned
Message-ID: <mailman.860.1356281737.3883.gasonics-pcs@snf.stanford.edu>

Leveled nest and unload arm..