Problem gasonics SNF 2012-05-03 13:23:12: plasma failed

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu May 3 22:20:10 PDT 2012


Found the tool power off  (second time with in 30days).
Power on the tool and found wafer inside the chamber,
had to removed the top lid to get the wafer out. I cleaned the
plasma detector photo diode (plasma failure problem)
and cycled wafer using 123 recipe.




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