Problem gasonics SNF 2012-05-08 01:11:02: unloading arm is too high?

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 8 07:33:12 PDT 2012


The unload arm was stuck in the partially up position.  Lubricated the arm and cycled 50 wafers.




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