Problem gasonics SNF 2012-05-26 01:10:53: unload arm misaligned

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sat May 26 01:10:54 PDT 2012


sometimes scrapes the underside of the finished wafer (thus knocking the wafer slightly aside) as it tries to move into place to unload it from the three-point perch.




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