From edmyers at stanford.edu  Tue Oct  7 08:32:12 2008
From: edmyers at stanford.edu (Ed Myers)
Date: Tue, 07 Oct 2008 08:32:12 -0700
Subject: Gasonics Gas Flow Faults
Message-ID: <6.2.5.6.2.20081007082805.02f5dcf0@stanford.edu>

All,

Elmer has looked in to the gas flow problems reported on Coral.  He 
has not been able to duplicate the errors.  For those of you who have 
seen the problem, could you give us more detail on how it 
happened.  For example, which recipe did it occur on (this means 
either a single number or an alphabet letter).  Similarly, did the 
fault show up after many wafers.

Thanks,
Ed