From gthareja at stanford.edu Sat Jul 4 17:29:36 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Sat, 4 Jul 2009 17:29:36 -0700 (PDT) Subject: Gasonics temperature ? In-Reply-To: <648746887.9833521246753636826.JavaMail.root@zm06.stanford.edu> Message-ID: <1256509750.9833621246753776865.JavaMail.root@zm06.stanford.edu> Dear Labmembers Does anyone know how high a temperature do the following Gasonics recipes go to 1. High Lamp Strip - 013 2. Low Lamp Strip - 044 I would appreciate if someone can share this info as my process is temperature sensitive. Dear Jim or Ed, Do you have some calibration data of peak temperature on Gasonics ? warm regards ~gaurav -- Gaurav Thareja Ph.D candidate, Nishi group Electrical Engineering Stanford University 420 Via Palou Mall, CISX 128 Stanford, CA 94305 Tel: 650-704-1029 Email: gthareja at stanford.edu From mcvittie at cis.Stanford.EDU Sun Jul 5 13:04:47 2009 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Sun, 5 Jul 2009 13:04:47 -0700 (PDT) Subject: Gasonics temperature ? In-Reply-To: <1256509750.9833621246753776865.JavaMail.root@zm06.stanford.edu> Message-ID: Gaurav, Since the wafers are lamp heated, their temperature depends on the details of the wafer. Metal, resistivity and and dielectric films all affect the wafer temperature with metalization having the biggest effect. Metalized wafers get significant hotter. Since the strip rate is quite sensitive to temperature, one can use the endpoint defector to get a rough idea of the temperature compared to a bare. Another way to get at the temperature is to use temperature dot/labels attached to the front of the wafer. It is pretty common to use Omega temperature dots in plasma etchers, however I have not used them in the Gasonics. Jim On Sat, 4 Jul 2009, Gaurav Thareja wrote: > Dear Labmembers > > Does anyone know how high a temperature do the following Gasonics recipes go to > > 1. High Lamp Strip - 013 > 2. Low Lamp Strip - 044 > > I would appreciate if someone can share this info as my process is temperature sensitive. > > Dear Jim or Ed, Do you have some calibration data of peak temperature on Gasonics ? > > warm regards > ~gaurav > > -- -------------------------------------------------------------- James (Jim) P. McVittie, Ph.D. Sr. Research Scientist Paul G. Allen Building Electrical Engineering Stanford Nanofabrication Facility jmcvittie at stanford.edu Stanford University Office: (650) 725-3640 Rm. 336X, 330 Serra Mall Lab: (650) 721-6834 Stanford, CA 94305-4075 Fax: (650) 723-4659 From mcvittie at cis.Stanford.EDU Mon Jul 6 13:45:54 2009 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Mon, 6 Jul 2009 13:45:54 -0700 (PDT) Subject: Gasonics temperature ? In-Reply-To: Message-ID: Gaurav, The wafer temperature in the Gasonics is too high (200C range) for the temperature dots which I have. I only have dots for up to 120C. They are available from Omega to 250C. In my previous reply, I neglected to mention that the source of the temperature control problem is the lack of a built-in temperature monitor. I am attaching the section of the Gasonics manual on temperature control and on optical end point monitoring. Note that the wafer temperature can go over 300C. Jim On Sun, 5 Jul 2009, Jim McVittie wrote: > Gaurav, > > Since the wafers are lamp heated, their temperature depends on the details > of the wafer. Metal, resistivity and and dielectric films all affect the > wafer temperature with metalization having the biggest effect. Metalized > wafers get significant hotter. Since the strip rate is quite sensitive to > temperature, one can use the endpoint defector to get a rough idea of the > temperature compared to a bare. Another way to get at the temperature is > to use temperature dot/labels attached to the front of the wafer. It is > pretty common to use Omega temperature dots in plasma etchers, however I > have not used them in the Gasonics. > > Jim > > On Sat, 4 Jul 2009, Gaurav Thareja wrote: > > > Dear Labmembers > > > > Does anyone know how high a temperature do the following Gasonics recipes go to > > > > 1. High Lamp Strip - 013 > > 2. Low Lamp Strip - 044 > > > > I would appreciate if someone can share this info as my process is temperature sensitive. > > > > Dear Jim or Ed, Do you have some calibration data of peak temperature on Gasonics ? > > > > warm regards > > ~gaurav > > > > > > -- -------------------------------------------------------------- James (Jim) P. McVittie, Ph.D. Sr. Research Scientist Paul G. Allen Building Electrical Engineering Stanford Nanofabrication Facility jmcvittie at stanford.edu Stanford University Office: (650) 725-3640 Rm. 336X, 330 Serra Mall Lab: (650) 721-6834 Stanford, CA 94305-4075 Fax: (650) 723-4659 -------------- next part -------------- A non-text attachment was scrubbed... Name: Gasonic-Temp-EPO.pdf Type: application/pdf Size: 258480 bytes Desc: URL: From maloney1 at stanford.edu Tue Jul 7 16:46:08 2009 From: maloney1 at stanford.edu (Michael Maloney) Date: Tue, 7 Jul 2009 16:46:08 -0700 (PDT) Subject: Training Message-ID: <2083982616.29119271247010368748.JavaMail.root@zm07.stanford.edu> Hello, I would like to be trained to gasonics. If anyone is willing just name the time and date, I'll bring the wafers. Thank you, Mike Maloney (Maloney1) Michael T. Maloney Postdoctoral Scholar Department of Neurology and Neurological Sciences Stanford University School of Medicine P222 MSLS ph: (650) 498-8112