Gasonics move

Mary Tang mtang at
Fri Sep 23 15:11:06 PDT 2011

Dear Gasonics users --

This is to inform you that the Gasonics will be moved next week to make 
room for the new Oxford III-V etcher.  The system will be shutdown at 8 
am next Wednesday.  Elmer has the system reserved through Friday, 
although the move and requalification of the system to take much less 
time than this; by Wednesday's end if all goes well.

Please try to plan your work accordingly; apologies for the inconvenience.

Team Etch
(Elmer, Nancy, Mike, Cesar, Jim McV, Mary)

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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