From mtang at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-09 20:26:34: TGO sensor problem Message-ID: <23013165.117.1344569195544.JavaMail.coral@shine> Machine is OK, but the toxic gas sensor CL-96 module has failed. No hydrides to be used until this is repaired. From maurice at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-09 20:26:34: TGO sensor problem Message-ID: <4474395.21.1344892994572.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-17 16:25:32: no process cooling water Message-ID: <33109868.169.1345245932299.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-17 16:25:32: no process cooling water Message-ID: <33032422.3.1345561492231.JavaMail.coral@shine> cooling water restored From ntayebi at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-21 16:11:51: lost wafer during transfer and back helium pressure high Message-ID: <3416757.37.1345590712505.JavaMail.coral@shine> I was running a precondition step on a wafer but the backhelium pressure was too high and was not able to stabilize. I aborted and during transfer system lost wafer. Please fix ASAP. Need to do more work. Thanks Noureddine From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-21 16:11:51: lost wafer during transfer and back helium pressure high Message-ID: <3611713.55.1345672761300.JavaMail.coral@shine> Cleaned the chamber, ran an etch and conditioning. From mtang at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-08-23 16:05:23: Clamp is a little off-center Message-ID: <5301183.93.1345763124784.JavaMail.coral@shine> It's been reported that the clamp is either slight loose or off-center. It should be OK to run, but be aware that the deposition on the wafer may not be centered. From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-08-24 17:54:04: Clamp is mis-aligned Message-ID: <960691.170.1345856045561.JavaMail.coral@shine> The clamp pattern on wafers shows that the clamp is off center by at least 1 mm. Elmaer said that he would align the clamp when he gets back on Monday. So far, we have not had any loading problems with the clamp with the clamp being this far off. Jim From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-28 09:00:29: Centering the clamp Message-ID: <28250734.35.1346169629535.JavaMail.coral@shine> From wslee at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-08-28 14:03:36: eta for repair? Message-ID: <22924220.46.1346187816626.JavaMail.coral@shine> any estimate as to when the hdp will be back online? thanks. From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-28 09:00:29: Centering the clamp Message-ID: <29880054.49.1346192721603.JavaMail.coral@shine> Clamp has been re-centered. The pattern on the wafer is now much more even around the wafer edge. Run clean and chamber coat (nitr). jim From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-08-24 17:54:04: Clamp is mis-aligned Message-ID: <14952919.50.1346192752643.JavaMail.coral@shine> Clamp re-centered From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-08-23 16:05:23: Clamp is a little off-center Message-ID: <13596299.51.1346192783681.JavaMail.coral@shine> Clamp re-centered. From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-08-28 14:03:36: eta for repair? Message-ID: <8779236.52.1346192793700.JavaMail.coral@shine> Done From wslee at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-08-30 16:36:36: SiO2 film results Message-ID: <24119369.139.1346369796440.JavaMail.coral@shine> I entered some data in the log book on etching SiO2 from hdpcvd in various HF etchants. Here are some more results on a 140s deposition. - measured across 9 points on woollam, using SiO2 program Thickness[A] Index of Refraction mean: 3990.6 1.4602 min: 3933.9 1.4583 max: 4032.9 1.4622 Std dev: 33.912 0.0010177 % range: 1.2397 0.13423 From derickson at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-31 13:52:58: Wafer lost during transfer Message-ID: <24428611.27.1346446378748.JavaMail.coral@shine> Process completed as normal but wafer was not returned to load lock after process. Please take care with removing the wafer as this is a very important sample. Thanks From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-08-31 13:52:58: Wafer lost during transfer Message-ID: <20868998.15.1346783338346.JavaMail.coral@shine> Recovered user's wafer and placed in the holder. Leak rate is < 2 mT/min. From derickson at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-09-04 12:29:24: Result after chamber vent Message-ID: <16602572.18.1346786964515.JavaMail.coral@shine> Etchback recipe ran fine with EPD @ 10min. Dep recipe worked OK and wafer transfer was not an issue. From faridz at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-09-24 12:35:23: wafer stuck inside the chamber Message-ID: <17603729.24.1348515324797.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-09-24 12:35:23: wafer stuck inside the chamber Message-ID: <19994027.25.1348522088838.JavaMail.coral@shine> Wafer still had some residual resit. Recovered wafer and cleaned the clamp. From kavehm at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-09-28 08:42:02: wafer stuck Message-ID: <19790736.90.1348846923909.JavaMail.coral@shine> in chamber From mcvittie at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-09-28 08:42:02: wafer stuck Message-ID: <3358723.96.1348857412067.JavaMail.coral@shine> Removed wafer. Aligned clamp. Cleaned bottom of clamp with Acetone. ran Chamber clean. Did SiN chamber coat. Jim From maurice at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-10-09 02:06:56: TGO system in fault Message-ID: <24749863.19.1349773617444.JavaMail.coral@shine> From shott at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-10-09 02:06:56: TGO system in fault Message-ID: <11991029.11.1349791083932.JavaMail.coral@shine> TGO CL-96 system is back in operation. John From derickson at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-10-15 10:15:41: Previous user did not pumpdown load lock. Message-ID: <23252842.12.1350321342439.JavaMail.coral@shine> From apal at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-10-28 18:11:42: Wafer lost inside the chamber Message-ID: <2244610.3.1351473103158.JavaMail.coral@shine> Hi, I was running a test run of SiNx but during automatic unloading, it failed to take out the wafer from the chamber. It gave an alarm. After clearing the alarm and venting the loadlock, I found the wafer on the arm is missing. - Ashish From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-10-29 09:30:06: Broken wafer Message-ID: <7186061.14.1351528206628.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-10-29 09:30:06: Broken wafer Message-ID: <5866887.19.1351536459030.JavaMail.coral@shine> Recovered the user's broken wafer. It looks like the wafer broke because it was not properly loaded. Ran 13 load/unload cycles with no problems. Ran a chamber etchback clean. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-10-28 18:11:42: Wafer lost inside the chamber Message-ID: <25929692.20.1351536495049.JavaMail.coral@shine> Recovered the user's broken wafer. It looks like the wafer broke because it was not properly loaded. Ran 13 load/unload cycles with no problems. Ran a chamber etchback clean. From jackson at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-11-07 21:55:46: is this in maintenance mode? Message-ID: <10632418.21.1352354147114.JavaMail.coral@shine> Would not let me start my wafer, highlighted 'PM-no transfer' then if I click off the pm, it will not take my tw in because it says it has to be in production mode. this is green lighted, is it still in maintenance mode? From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-11-07 21:55:46: is this in maintenance mode? Message-ID: <30149991.35.1352400000595.JavaMail.coral@shine> another user placed this tool on maintenance. Changed mode to production. From faridz at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-12 11:01:22: wafer stuck in the chamber.... Message-ID: <6466829.9.1352746883229.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-12 11:01:22: wafer stuck in the chamber.... Message-ID: <20919435.2.1352761079460.JavaMail.coral@shine> Recovered user's wafer. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-11-13 15:25:46: New badger interlock Message-ID: <8321782.20.1352849146558.JavaMail.coral@shine> A new badger (new Coral) interlock has been installed on the tool. When badger is disabled, the system will have a "Facility ..." alarm. This alarm will clear when the system is enabled on Coral. From piggotta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: piggotta at snf.stanford.edu (piggotta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-21 14:23:45: Need to get wafer out of chamber Message-ID: <24814939.3.1353536626159.JavaMail.coral@shine> The HDPCVD ran into an error during a process, forcing us to stop the job. Unfortunately, we aren't able to access the maintenance mode (which we need to extract the wafer), and in the process we managed to accidentally log out of the system. Could you possibly send me or Nancy the necessary user names / passwords to: a) Log back into one of the users ('system','snf', or 'user') b) Access the maintenance mode Thanks! From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-21 14:23:45: Need to get wafer out of chamber Message-ID: <22073172.15.1353545304465.JavaMail.coral@shine> logged in as System. Passwd is 'system' From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-21 16:50:04: Tried to remove wafer, not on blade. Message-ID: <12207417.16.1353545404371.JavaMail.coral@shine> Able to log into system using 'system' as passwd. Wafer is lost in chamber. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-11-21 16:50:04: Tried to remove wafer, not on blade. Message-ID: <32904744.44.1353969676818.JavaMail.coral@shine> Removed the broken wafer, cleaned the chamber and cycled wafer. From jrshakya at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-11-28 22:10:56: Wafer not detected and system halted Message-ID: <23314523.13.1354169456478.JavaMail.coral@shine> After transfering wafer into the chamber, when job was started in Production mode the system complained that there was no material inside. After that it didn't let even take the wafer out. There is wafer inside the system. From jrshakya at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-11-29 00:34:17: The problem with Wafer not found SOLVED. Message-ID: <13710243.15.1354178058026.JavaMail.coral@shine> There is no problem. From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-11-28 22:10:56: Wafer not detected and system halted Message-ID: <20171724.33.1354217035242.JavaMail.coral@shine> user solved problem From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-11-29 00:34:17: The problem with Wafer not found SOLVED. Message-ID: <20492501.34.1354217042313.JavaMail.coral@shine> archived From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-09-04 12:29:24: Result after chamber vent Message-ID: <10721809.35.1354217063501.JavaMail.coral@shine> good to hear From latta at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-10-15 10:15:41: Previous user did not pumpdown load lock. Message-ID: <15863915.36.1354217077649.JavaMail.coral@shine> grrrrrr From jrshakya at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-04 18:52:28: Temp unable to reach setpoint Message-ID: <24001150.35.1354675948136.JavaMail.coral@shine> During HDP-SiO2 run, the first step (thermal soak) failed reporting and error saying unable to reach temp setpoint of 90C, heater was at 141.3C. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-04 18:52:28: Temp unable to reach setpoint Message-ID: <28277251.15.1354733064453.JavaMail.coral@shine> Unable to duplicate the problem. Ran 2 wafers using the user's recipe with no problems. From pnataraj at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-05 13:21:06: wafer inside got stuck Message-ID: <14494287.33.1354742467326.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-05 13:21:06: wafer inside got stuck Message-ID: <23206437.49.1354751633460.JavaMail.coral@shine> Retrieved the user's wafer and placed on top of the load lock. From jimkruger at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-12-07 12:36:58: "HD_SiO2" dep rate Message-ID: <4931467.8.1354912619420.JavaMail.coral@shine> I find uniformity, Index and dep rate better than 1%. The 6 second "Light" step should be included to calculate the total dep time. The rate is 27.58 +/- 1% for "HD_SiO2" From jackson at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-11 20:58:34: pumptrain error, cooling water Message-ID: <10796546.7.1355288315097.JavaMail.coral@shine> etcher wont pump to base pressure and run process From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-12 12:06:48: communication problem Message-ID: <11051796.2.1355342809401.JavaMail.coral@shine> Communication problem with the ion gauge controller From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-12 12:06:48: communication problem Message-ID: <13041996.10.1355370463504.JavaMail.coral@shine> Changed the configuration so the that the system does not look for the ion gauge (it doesn't have one). Reset the devicenet. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-11 20:58:34: pumptrain error, cooling water Message-ID: <17620673.11.1355370521943.JavaMail.coral@shine> Restarted the pumping system. The turbo pump shutdown due to a water flow glitch.) From jrshakya at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-16 15:23:05: neither keyboard nor mouse works Message-ID: <16985333.12.1355700186141.JavaMail.coral@shine> Hi I found the sysyem with error messages saying "Heater failed to achieve temp setpoint 90. Heater temp was 109.2C. Also the keyboard and mouse didn't work. So nothing can be run in the system. -Joe From jrshakya at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-16 16:22:36: Shutting down since nothing can be run Message-ID: <17993445.15.1355703757194.JavaMail.coral@shine> No mouse or keyboard responding. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-16 16:22:36: Shutting down since nothing can be run Message-ID: <16317907.31.1355776198310.JavaMail.coral@shine> Rebooted the computers. From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-16 15:23:05: neither keyboard nor mouse works Message-ID: <3947077.32.1355776205328.JavaMail.coral@shine> Rebooted the computers. From wslee at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Problem hdpcvd SNF 2012-12-18 13:55:08: HDP_etchbacK: endpoint not found Message-ID: <22589165.10.1355867709742.JavaMail.coral@shine> I ran the HDP_etchback recipe but it could not find the endpoint and the recipe continued onto the next step. In the past, it usually stays in endpoint detection until I manually tell it to stop waiting for it. I'm not sure if the endpoint detection is turned off. From wslee at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Comment hdpcvd SNF 2012-12-18 13:57:14: fast etch rate in 50:1 HF Message-ID: <907175.11.1355867834324.JavaMail.coral@shine> I measured an etch rate of ~7500A in 50:1 HF for the HDP_SiO2. My past etch rate was ~1300A per minute. I am not sure if my original measurement was off or if the oxide has changed over time. From jimkruger at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-19 12:09:48: Broken wafer Message-ID: <22748098.28.1355947788923.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:55:51 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:55:51 -0000 Subject: Shutdown hdpcvd SNF 2012-12-19 12:09:48: Broken wafer Message-ID: <8513819.35.1355959680670.JavaMail.coral@shine> Cleaned the chamber and ran a plasma clean.