December 2012 Archives by author

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Starting: Sun Dec 23 08:55:51 PST 2012
Ending: Sun Dec 23 08:55:51 PST 2012
Messages: 61

Problem hdpcvd SNF 2012-10-28 18:11:42: Wafer lost inside the chamber apal at snf.stanford.edu
Comment hdpcvd SNF 2012-09-04 12:29:24: Result after chamber vent derickson at snf.stanford.edu
Comment hdpcvd SNF 2012-10-15 10:15:41: Previous user did not pumpdown load lock. derickson at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-31 13:52:58: Wafer lost during transfer derickson at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-12 12:06:48: communication problem eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-12 12:06:48: communication problem eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-16 16:22:36: Shutting down since nothing can be run eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-12-11 20:58:34: pumptrain error, cooling water eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-09-24 12:35:23: wafer stuck inside the chamber eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-31 13:52:58: Wafer lost during transfer eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-12 11:01:22: wafer stuck in the chamber.... eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-12-05 13:21:06: wafer inside got stuck eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-10-28 18:11:42: Wafer lost inside the chamber eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-28 09:00:29: Centering the clamp eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-12-04 18:52:28: Temp unable to reach setpoint eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-11-07 21:55:46: is this in maintenance mode? eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-21 16:50:04: Tried to remove wafer, not on blade. eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-17 16:25:32: no process cooling water eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-17 16:25:32: no process cooling water eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-21 16:11:51: lost wafer during transfer and back helium pressure high eenriquez at snf.stanford.edu
Problem hdpcvd SNF 2012-12-16 15:23:05: neither keyboard nor mouse works eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-10-29 09:30:06: Broken wafer eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-10-29 09:30:06: Broken wafer eenriquez at snf.stanford.edu
Comment hdpcvd SNF 2012-11-13 15:25:46: New badger interlock eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-19 12:09:48: Broken wafer eenriquez at snf.stanford.edu
Shutdown hdpcvd SNF 2012-09-24 12:35:23: wafer stuck inside the chamber faridz at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-12 11:01:22: wafer stuck in the chamber.... faridz at snf.stanford.edu
Problem hdpcvd SNF 2012-11-07 21:55:46: is this in maintenance mode? jackson at snf.stanford.edu
Problem hdpcvd SNF 2012-12-11 20:58:34: pumptrain error, cooling water jackson at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-19 12:09:48: Broken wafer jimkruger at snf.stanford.edu
Comment hdpcvd SNF 2012-12-07 12:36:58: "HD_SiO2" dep rate jimkruger at snf.stanford.edu
Comment hdpcvd SNF 2012-11-29 00:34:17: The problem with Wafer not found SOLVED. jrshakya at snf.stanford.edu
Problem hdpcvd SNF 2012-12-16 15:23:05: neither keyboard nor mouse works jrshakya at snf.stanford.edu
Shutdown hdpcvd SNF 2012-12-16 16:22:36: Shutting down since nothing can be run jrshakya at snf.stanford.edu
Problem hdpcvd SNF 2012-11-28 22:10:56: Wafer not detected and system halted jrshakya at snf.stanford.edu
Problem hdpcvd SNF 2012-12-04 18:52:28: Temp unable to reach setpoint jrshakya at snf.stanford.edu
Problem hdpcvd SNF 2012-09-28 08:42:02: wafer stuck kavehm at snf.stanford.edu
Comment hdpcvd SNF 2012-09-04 12:29:24: Result after chamber vent latta at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-21 16:50:04: Tried to remove wafer, not on blade. latta at snf.stanford.edu
Comment hdpcvd SNF 2012-10-15 10:15:41: Previous user did not pumpdown load lock. latta at snf.stanford.edu
Problem hdpcvd SNF 2012-11-28 22:10:56: Wafer not detected and system halted latta at snf.stanford.edu
Comment hdpcvd SNF 2012-11-29 00:34:17: The problem with Wafer not found SOLVED. latta at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-21 14:23:45: Need to get wafer out of chamber latta at snf.stanford.edu
Shutdown hdpcvd SNF 2012-10-09 02:06:56: TGO system in fault maurice at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-09 20:26:34: TGO sensor problem maurice at snf.stanford.edu
Problem hdpcvd SNF 2012-08-23 16:05:23: Clamp is a little off-center mcvittie at snf.stanford.edu
Problem hdpcvd SNF 2012-08-24 17:54:04: Clamp is mis-aligned mcvittie at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-28 09:00:29: Centering the clamp mcvittie at snf.stanford.edu
Problem hdpcvd SNF 2012-09-28 08:42:02: wafer stuck mcvittie at snf.stanford.edu
Comment hdpcvd SNF 2012-08-28 14:03:36: eta for repair? mcvittie at snf.stanford.edu
Problem hdpcvd SNF 2012-08-24 17:54:04: Clamp is mis-aligned mcvittie at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-09 20:26:34: TGO sensor problem mtang at snf.stanford.edu
Problem hdpcvd SNF 2012-08-23 16:05:23: Clamp is a little off-center mtang at snf.stanford.edu
Shutdown hdpcvd SNF 2012-08-21 16:11:51: lost wafer during transfer and back helium pressure high ntayebi at snf.stanford.edu
Shutdown hdpcvd SNF 2012-11-21 14:23:45: Need to get wafer out of chamber piggotta at snf.stanford.edu
Problem hdpcvd SNF 2012-12-05 13:21:06: wafer inside got stuck pnataraj at snf.stanford.edu
Shutdown hdpcvd SNF 2012-10-09 02:06:56: TGO system in fault shott at snf.stanford.edu
Problem hdpcvd SNF 2012-12-18 13:55:08: HDP_etchbacK: endpoint not found wslee at snf.stanford.edu
Comment hdpcvd SNF 2012-08-28 14:03:36: eta for repair? wslee at snf.stanford.edu
Comment hdpcvd SNF 2012-08-30 16:36:36: SiO2 film results wslee at snf.stanford.edu
Comment hdpcvd SNF 2012-12-18 13:57:14: fast etch rate in 50:1 HF wslee at snf.stanford.edu

Last message date: Sun Dec 23 08:55:51 PST 2012
Archived on: Sun Dec 23 08:55:51 PST 2012

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