From eenriquez at snf.stanford.edu Mon Jul 2 09:45:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 09:45:48 -0700 Subject: Problem hdpcvd SNF 2012-06-13 13:59:15: Manual IO temp setting to correct temp reading problem Message-ID: Bad I/O channel on the chiller. Vendor came in and switched to a different channel. From latta at snf.stanford.edu Tue Jul 3 09:50:28 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Jul 2012 09:50:28 -0700 Subject: Comment hdpcvd SNF 2012-06-09 13:39:43: Update chuck temp Message-ID: chuck temp ok. From faridz at snf.stanford.edu Thu Jul 12 16:11:25 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 12 Jul 2012 16:11:25 -0700 Subject: Problem hdpcvd SNF 2012-07-12 16:11:24: unable to run wafers Message-ID: error message: "Abort start due to unconfirmed wafer in PM1" From faridz at snf.stanford.edu Fri Jul 13 12:18:43 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 13 Jul 2012 12:18:43 -0700 Subject: Shutdown hdpcvd SNF 2012-07-13 12:18:42: wafer transfer failed. Message-ID: unable to transfer wafer from process chamber. From eenriquez at snf.stanford.edu Fri Jul 13 14:38:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 14:38:45 -0700 Subject: Shutdown hdpcvd SNF 2012-07-13 12:18:42: wafer transfer failed. Message-ID: Wafer stuck to the clamp. Jim Mc help us removed wafer and run the chamber clean. Leak rate is about 1.2 mT/min From eenriquez at snf.stanford.edu Fri Jul 13 14:39:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 14:39:12 -0700 Subject: Problem hdpcvd SNF 2012-07-12 16:11:24: unable to run wafers Message-ID: Wafer stuck to the clamp. Jim Mc help us removed wafer and run the chamber clean. Leak rate is about 1.2 mT/min