From mcvittie at snf.stanford.edu Thu Jun 7 12:24:52 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 7 Jun 2012 12:24:52 -0700 Subject: Shutdown hdpcvd SNF 2012-06-07 12:24:52: Chuck Temp Will Not Go Above 29C Message-ID: Heat exchanger says chuck temp is at process temp (90C) but PM (process monitor) screen says temp is at 29C. Shutting down ( but not power) and restarting did not solve problem. Jim From eenriquez at snf.stanford.edu Sat Jun 9 13:39:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sat, 9 Jun 2012 13:39:43 -0700 Subject: Comment hdpcvd SNF 2012-06-09 13:39:43: Update chuck temp Message-ID: Field service will be in next week. Waiting for ETA. From mcvittie at snf.stanford.edu Wed Jun 13 13:56:59 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 13 Jun 2012 13:56:59 -0700 Subject: Shutdown hdpcvd SNF 2012-06-07 12:24:52: Chuck Temp Will Not Go Above 29C Message-ID: System still has comunication problem between heat exchanger and system but we have a work around. Use maintenance mode to change ananlog I/O for electrode temp to 90C which is the external probe temp from heat exchanger display. Run both plasma chamber clean and SiNx dep runs with no problem. Dep rate is close to old value before MFC change. From mcvittie at snf.stanford.edu Wed Jun 13 13:59:15 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 13 Jun 2012 13:59:15 -0700 Subject: Problem hdpcvd SNF 2012-06-13 13:59:15: Manual IO temp setting to correct temp reading problem Message-ID: Below is note from clear comment for shutdown: System still has comunication problem between heat exchanger and system but we have a work around. Use maintenance mode to change ananlog I/O for electrode temp to 90C which is the external probe temp from heat exchanger display. Run both plasma chamber clean and SiNx dep runs with no problem. Dep rate is close to old value before MFC change. From eenriquez at snf.stanford.edu Tue Jun 19 08:10:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jun 2012 08:10:58 -0700 Subject: Shutdown hdpcvd SNF 2012-06-19 08:10:57: chiller setpoint problem Message-ID: The setpoint on the chiller does not match the setpoint sent out by the system. The setpoint sent out by the system is 90 C but the setpoint on the chiller is -99.9 C. From eenriquez at snf.stanford.edu Tue Jun 19 14:09:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jun 2012 14:09:34 -0700 Subject: Shutdown hdpcvd SNF 2012-06-19 08:10:57: chiller setpoint problem Message-ID: Still troubleshooting but system can be run with the chiller in manual mode. From kavehm at snf.stanford.edu Tue Jun 19 17:31:17 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Tue, 19 Jun 2012 17:31:17 -0700 Subject: Shutdown hdpcvd SNF 2012-06-19 17:31:17: Wafer in chamber Message-ID: Ran about 6-7 wafers. Got transfer error on last wafer. Transfer Error: AL lost material after attempt to receive material Tried to clear alarm and restart transfer, but no luck. From mcvittie at snf.stanford.edu Wed Jun 20 11:51:18 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 20 Jun 2012 11:51:18 -0700 Subject: Shutdown hdpcvd SNF 2012-06-19 17:31:17: Wafer in chamber Message-ID: Had to vent chamber to remove wafer. Problem was caused by residue from tape at edge of wafer. Residue cause wafer to stick to clamp on declamping so it could not be unloaded. Leaktest after about 20 min of pump gave rate of 0.7 mT/m. Jim From mtang at snf.stanford.edu Sat Jun 23 13:43:55 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 13:43:55 -0700 Subject: Shutdown hdpcvd SNF 2012-06-23 13:43:55: Silanes are shut off Message-ID: Due to fire detector reset problem From tberg at snf.stanford.edu Mon Jun 25 13:16:57 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 13:16:57 -0700 Subject: Shutdown hdpcvd SNF 2012-06-23 13:43:55: Silanes are shut off Message-ID: silane is back on