Shutdown hdpcvd SNF 2012-06-19 17:31:17: Wafer in chamber

kavehm at snf.stanford.edu kavehm at snf.stanford.edu
Tue Jun 19 17:31:17 PDT 2012


Ran about 6-7 wafers. Got transfer error on last wafer.
Transfer Error: AL lost material after attempt to receive material
Tried to clear alarm and restart transfer, but no luck.




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