Shutdown hdpcvd SNF 2012-06-19 17:31:17: Wafer in chamber

kavehm at kavehm at
Tue Jun 19 17:31:17 PDT 2012

Ran about 6-7 wafers. Got transfer error on last wafer.
Transfer Error: AL lost material after attempt to receive material
Tried to clear alarm and restart transfer, but no luck.

More information about the hdpcvd-pcs mailing list