[hdpcvd-pcs] Problem hdpcvd SNF 2013-02-17 09:15:09: Transfer error

mzi9890 at yahoo.com mzi9890 at yahoo.com
Sun Feb 17 09:15:10 PST 2013

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Wafer unloaded ok but error shows wafer still in chamber.

Previous message: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-02-12 09:13:45: Process cooling water problem
Next message: [hdpcvd-pcs] Problem hdpcvd SNF 2013-02-17 09:15:09: Transfer error
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