[hdpcvd-pcs] Shutdown hdpcvd SNF 2013-02-24 15:34:36: wafer stuck in the chamber

elmere at stanford.edu elmere at stanford.edu
Mon Feb 25 10:45:15 PST 2013


Mike recovered the stuck wafer. The wafer was stuck to the clamp.


More information about the hdpcvd-pcs mailing list