From farid.zuberi at grandisinc.com  Wed Jan 16 13:30:23 2013
From: farid.zuberi at grandisinc.com (farid.zuberi at grandisinc.com)
Date: Wed, 16 Jan 2013 13:30:23 -0800 (PST)
Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-01-16 13:30:23: wafer stuck
 inside the chamber !!
Message-ID: <8171700.30.1358371823417.JavaMail.coral@snc-coraldb.stanford.edu>


From elmere at stanford.edu  Wed Jan 16 14:40:39 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 16 Jan 2013 14:40:39 -0800 (PST)
Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-01-16 13:30:23: wafer
 stuck inside the chamber !!
Message-ID: <10893178.33.1358376039979.JavaMail.coral@snc-coraldb.stanford.edu>

Recovered the user's wafer. The wafer was stuck to the clamp. The wafer had residual kapton tape adhesive.  Chamber leak rate is 1.8 mT/min