[hdpcvd-pcs] Shutdown hdpcvd SNF 2013-01-16 13:30:23: wafer stuck inside the chamber !!

elmere at stanford.edu elmere at stanford.edu
Wed Jan 16 14:40:39 PST 2013


Recovered the user's wafer. The wafer was stuck to the clamp. The wafer had residual kapton tape adhesive.  Chamber leak rate is 1.8 mT/min


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