From hong at siliciumenergy.com Tue Mar 12 17:27:55 2013 From: hong at siliciumenergy.com (hong at siliciumenergy.com) Date: Tue, 12 Mar 2013 17:27:55 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-12 17:27:55: Wafer lost Message-ID: <26507463.6.1363134475476.JavaMail.coral@snc-coraldb.stanford.edu> Hi, My sample wafer stuck in the chamber. Please help me to retrive it. Thank you, Young- From elmere at stanford.edu Wed Mar 13 17:01:09 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Wed, 13 Mar 2013 17:01:09 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-12 17:27:55: Wafer lost Message-ID: <12723504.31.1363219269071.JavaMail.coral@snc-coraldb.stanford.edu> The user's wafer broke inside the chamber. A piece of the clamp broke as well. replaced the clamp and verified the wafer hand-off. Now running a clean. From qran at stanford.edu Tue Mar 19 22:25:04 2013 From: qran at stanford.edu (qran at stanford.edu) Date: Tue, 19 Mar 2013 22:25:04 -0700 (PDT) Subject: [hdpcvd-pcs] Problem hdpcvd SNF 2013-03-19 22:25:03: heilum pressure isn't stable Message-ID: <15153557.30.1363757104252.JavaMail.coral@snc-coraldb.stanford.edu> tried to run HDP-siNx recipe. but system gave warning "helium backside pressure never stablized". Couldn't do the deposition. From elmere at stanford.edu Wed Mar 20 09:04:58 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Wed, 20 Mar 2013 09:04:58 -0700 (PDT) Subject: [hdpcvd-pcs] Problem hdpcvd SNF 2013-03-19 22:25:03: heilum pressure isn't stable Message-ID: <22642837.34.1363795498971.JavaMail.coral@snc-coraldb.stanford.edu> Ran HDP-SiO2 recipe with no problems. Helium flow @ 4Torr = 7.3 sccm From mcvittie at stanford.edu Wed Mar 20 09:20:00 2013 From: mcvittie at stanford.edu (Jim McVittie) Date: Wed, 20 Mar 2013 09:20:00 -0700 (PDT) Subject: [hdpcvd-pcs] Problem hdpcvd SNF 2013-03-19 22:25:03: heilum pressure isn't stable In-Reply-To: <15153557.30.1363757104252.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: <542540517.9524691.1363796400138.JavaMail.root@stanford.edu> Qran, The PT wafer clamping does not use an o-ring or lip seal to help keep the He from leaking out. This means that keeping the backside of your wafers really clean is important for all the PT ICP tools, which include the HDP tool. My experience is that when you get a "helium backside pressure never stablized" error, the error will not come up if the next wafer has a clean backside. Jim ----- Original Message ----- From: qran at stanford.edu To: hdpcvd-pcs at snf.stanford.edu Sent: Tuesday, March 19, 2013 10:25:04 PM Subject: [hdpcvd-pcs] Problem hdpcvd SNF 2013-03-19 22:25:03: heilum pressure isn't stable tried to run HDP-siNx recipe. but system gave warning "helium backside pressure never stablized". Couldn't do the deposition. _______________________________________________ hdpcvd-pcs mailing list hdpcvd-pcs at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/hdpcvd-pcs From farid.zuberi at grandisinc.com Wed Mar 20 10:31:19 2013 From: farid.zuberi at grandisinc.com (farid.zuberi at grandisinc.com) Date: Wed, 20 Mar 2013 10:31:19 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-20 10:31:18: backside helium preseure unstable Message-ID: <26169599.37.1363800679179.JavaMail.coral@snc-coraldb.stanford.edu> unable to run process due to above error. From mcvittie at stanford.edu Wed Mar 20 10:40:00 2013 From: mcvittie at stanford.edu (Jim McVittie) Date: Wed, 20 Mar 2013 10:40:00 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-20 10:31:18: backside helium preseure unstable In-Reply-To: <26169599.37.1363800679179.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: <932704539.9621362.1363801200494.JavaMail.root@stanford.edu> Farid, Did check the back side of your wafer? Jim ----- Original Message ----- From: "farid zuberi" To: hdpcvd-pcs at snf.stanford.edu Sent: Wednesday, March 20, 2013 10:31:19 AM Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-20 10:31:18: backside helium preseure unstable unable to run process due to above error. _______________________________________________ hdpcvd-pcs mailing list hdpcvd-pcs at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/hdpcvd-pcs From elmere at stanford.edu Wed Mar 20 12:32:36 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Wed, 20 Mar 2013 12:32:36 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-20 10:31:18: backside helium preseure unstable Message-ID: <10829728.41.1363807956642.JavaMail.coral@snc-coraldb.stanford.edu> Found a tiny wafer chip on the electrode. Cleaned the electrode and leak rate = 1.2 mT/min. Now heating up the chamber. From dlee76 at stanford.edu Thu Mar 21 09:47:13 2013 From: dlee76 at stanford.edu (dlee76 at stanford.edu) Date: Thu, 21 Mar 2013 09:47:13 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-21 09:47:12: helium leakage problem Message-ID: <15710415.81.1363884433452.JavaMail.coral@snc-coraldb.stanford.edu> From elmere at stanford.edu Thu Mar 21 15:19:37 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Thu, 21 Mar 2013 15:19:37 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-21 09:47:12: helium leakage problem Message-ID: <6901622.93.1363904377300.JavaMail.coral@snc-coraldb.stanford.edu> Found large wafer piece at the bottom of the chamber. Cleaned up the chamber and loadlock. Please report any broken or chipped wafer. This will eliminate any unnecessary downtime. From dlee76 at stanford.edu Thu Mar 21 16:23:26 2013 From: dlee76 at stanford.edu (dlee76 at stanford.edu) Date: Thu, 21 Mar 2013 16:23:26 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-21 16:23:26: Wafer break Message-ID: <9166284.95.1363908206933.JavaMail.coral@snc-coraldb.stanford.edu> Hi.. During the process, the edge part of the wafers are broken.. From elmere at stanford.edu Fri Mar 22 12:10:13 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Fri, 22 Mar 2013 12:10:13 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-21 16:23:26: Wafer break Message-ID: <19381579.108.1363979413379.JavaMail.coral@snc-coraldb.stanford.edu> The wafer was not centered on the electrode. A tiny portion of the wafer hung off the edge even when the wafer is properly loaded on the arm. Adjusted the loader arm., ran a clean and a test. From elmere at stanford.edu Fri Mar 22 15:23:34 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Fri, 22 Mar 2013 15:23:34 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-22 15:23:33: no power to the chiller Message-ID: <3559516.115.1363991014354.JavaMail.coral@snc-coraldb.stanford.edu> Unable to turn the chiller on. Reset the entire system but chiller is still off. From elmere at stanford.edu Mon Mar 25 11:08:46 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Mon, 25 Mar 2013 11:08:46 -0700 (PDT) Subject: [hdpcvd-pcs] Shutdown hdpcvd SNF 2013-03-22 15:23:33: no power to the chiller Message-ID: <19335035.5.1364234926151.JavaMail.coral@snc-coraldb.stanford.edu> Reset the chiller's circuit breaker. Ran a chamber clean.