[hdpcvd] SiO2 Standard Dep Rate, Etch Rate

Vijay Kris Narasimhan vijayn at stanford.edu
Tue Apr 30 14:17:37 PDT 2013


Hi Folks, 


For those of you who routinely run SiO2 in HDPCVD, do y'all have standard dep rates and etch rates in HF:H20 50:1? Any tidbits would be appreciated. I saw some mention of dep rates in the log book, but not always. Thanks! 


Vijay 
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