From heibel at snf.stanford.edu  Thu Jul 19 07:24:07 2001
From: heibel at snf.stanford.edu (heibel at snf.stanford.edu)
Date: Jul 19, 2001 7:24:07 AM
Subject: Problem headway2 2001-07-19 07:24:06: headway won't spin
Message-ID: <mailman.84.1356281767.3914.headway2-pcs@snf.stanford.edu>

Headway will not spin.  While coating a wafer, a piece of aluminum foil stuck to the edge of the wafer and stopped it from spinning.  After removing the foil and wafer, vacuum was still functional, but chuck won't turn.



From heibel at snf.stanford.edu  Thu Jul 19 07:24:40 2001
From: heibel at snf.stanford.edu (heibel at snf.stanford.edu)
Date: Jul 19, 2001 7:24:40 AM
Subject: Shutdown headway2 2001-07-19 07:24:39: headway won't spin
Message-ID: <mailman.85.1356281767.3914.headway2-pcs@snf.stanford.edu>

please see problem report.



From vilanova at snf.stanford.edu  Thu Jul 19 08:25:44 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 19, 2001 8:25:44 AM
Subject: Problem headway2 2001-07-19 07:24:06: headway won't spin
Message-ID: <mailman.86.1356281767.3914.headway2-pcs@snf.stanford.edu>

Replaced fuse, tested it , working ok, ready for use



From vilanova at snf.stanford.edu  Thu Jul 19 08:26:12 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 19, 2001 8:26:12 AM
Subject: Shutdown headway2 2001-07-19 07:24:39: headway won't spin
Message-ID: <mailman.87.1356281767.3914.headway2-pcs@snf.stanford.edu>

Replaced Fuse , Tested it , working ok , Ready for use



From flannery at snf.stanford.edu  Sat Jul 28 03:48:27 2001
From: flannery at snf.stanford.edu (flannery at snf.stanford.edu)
Date: Jul 28, 2001 3:48:27 PM
Subject: Problem headway2 2001-07-28 15:48:25: Fuse Blew
Message-ID: <mailman.88.1356281767.3914.headway2-pcs@snf.stanford.edu>

The middle 4A fuse blew on the driver box. I replaced it with a 4A fuse from the spare unit under the bench. (BTW - this 4A fuse was in a 0.5A socket). I might suggest that a box of spare fuses be kept by the machine for just such an occasion.



From vilanova at snf.stanford.edu  Mon Jul 30 08:14:11 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 30, 2001 8:14:11 AM
Subject: Problem headway2 2001-07-28 15:48:25: Fuse Blew
Message-ID: <mailman.89.1356281767.3914.headway2-pcs@snf.stanford.edu>

System Tested it , Working ok , ready to use



From dton at snf.stanford.edu  Mon Jul 30 03:02:35 2001
From: dton at snf.stanford.edu (dton at snf.stanford.edu)
Date: Jul 30, 2001 3:02:35 PM
Subject: Problem headway2 2001-07-30 15:02:32: not spinning... fuse blown?
Message-ID: <mailman.90.1356281767.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Jul 31 08:39:41 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jul 31, 2001 8:39:41 AM
Subject: Problem headway2 2001-07-30 15:02:32: not spinning... fuse blown?
Message-ID: <mailman.91.1356281767.3914.headway2-pcs@snf.stanford.edu>

I checked all the  fuses cables , everything and I couldn't find nothing wrong with it. the system it's wrking perfectly fine. 
Ready to use.