From sguan at snf.stanford.edu  Thu Sep  6 11:34:23 2001
From: sguan at snf.stanford.edu (sguan at snf.stanford.edu)
Date: Sep 6, 2001 11:34:23 AM
Subject: Problem headway2 2001-09-06 11:34:20: pins are missing from the bottom electrode
Message-ID: <mailman.100.1356281767.3914.headway2-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Sep  6 11:49:25 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 6, 2001 11:49:25 AM
Subject: Problem headway2 2001-09-06 11:34:20: pins are missing from the bottom electrode
Message-ID: <mailman.101.1356281767.3914.headway2-pcs@snf.stanford.edu>

problem posted by mistake.



From ethrush at snf.stanford.edu  Sat Sep 29 11:45:09 2001
From: ethrush at snf.stanford.edu (ethrush at snf.stanford.edu)
Date: Sep 29, 2001 11:45:09 AM
Subject: Problem headway2 2001-09-29 11:45:08: resist in pump
Message-ID: <mailman.102.1356281767.3914.headway2-pcs@snf.stanford.edu>

I think that resist has gone down the vacuum chuck again.  The chuck spins without anything on it.
Evan