Problem headway2 2001-09-29 11:45:08: resist in pump

ethrush at snf.stanford.edu ethrush at snf.stanford.edu
Sat Sep 29 11:45:09 PDT 2001

Previous message: Problem headway2 2001-09-06 11:34:20: pins are missing from the bottom electrode
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I think that resist has gone down the vacuum chuck again.  The chuck spins without anything on it.
Evan

Previous message: Problem headway2 2001-09-06 11:34:20: pins are missing from the bottom electrode
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