From vilanova at snf.stanford.edu  Fri Nov  1 07:28:24 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 1, 2002 7:28:24 AM
Subject: Problem headway2 2002-10-31 17:23:09: unable to spin wafer
Message-ID: <mailman.202.1356281768.3914.headway2-pcs@snf.stanford.edu>

tested Working Fine, User Error.
Ok to use 



From emyers at snf.stanford.edu  Mon Nov  4 10:52:57 2002
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Nov 4, 2002 10:52:57 AM
Subject: Problem headway2 2002-11-04 10:52:57: Headway
Message-ID: <mailman.203.1356281768.3914.headway2-pcs@snf.stanford.edu>

Spindle rotates without a wafer on the chuck



From vilanova at snf.stanford.edu  Mon Nov  4 11:15:07 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 4, 2002 11:15:07 AM
Subject: Problem headway2 2002-11-04 10:52:57: Headway
Message-ID: <mailman.204.1356281768.3914.headway2-pcs@snf.stanford.edu>

Removed photoresist from spindle , tested.
working ok . ready to use . :-)



From vilanova at snf.stanford.edu  Wed Nov  6 07:45:52 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 6, 2002 7:45:52 AM
Subject: Shutdown headway2 2002-11-06 07:45:52: Preventive maintenance In Progress
Message-ID: <mailman.205.1356281768.3914.headway2-pcs@snf.stanford.edu>

Pm In progress



From vilanova at snf.stanford.edu  Wed Nov  6 08:46:42 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 6, 2002 8:46:42 AM
Subject: Shutdown headway2 2002-11-06 07:45:52: Preventive maintenance In Progress
Message-ID: <mailman.206.1356281768.3914.headway2-pcs@snf.stanford.edu>

Monthly Pm Completed



From vilanova at snf.stanford.edu  Thu Nov 21 09:48:55 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 21, 2002 9:48:55 AM
Subject: Shutdown headway2 2002-11-21 09:48:54: Weekly Pm In progress......
Message-ID: <mailman.207.1356281768.3914.headway2-pcs@snf.stanford.edu>

Weekly In progress ----------------------->



From vilanova at snf.stanford.edu  Thu Nov 21 10:40:03 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 21, 2002 10:40:03 AM
Subject: Shutdown headway2 2002-11-21 09:48:54: Weekly Pm In progress......
Message-ID: <mailman.208.1356281768.3914.headway2-pcs@snf.stanford.edu>

Weekly Pm Completed . Ok to use . 



From ethrush at snf.stanford.edu  Mon Nov 25 08:50:12 2002
From: ethrush at snf.stanford.edu (ethrush at snf.stanford.edu)
Date: Nov 25, 2002 8:50:12 AM
Subject: Problem headway2 2002-11-25 08:50:11: headway vac is always on
Message-ID: <mailman.209.1356281768.3914.headway2-pcs@snf.stanford.edu>

headway vac is always on.  Difficult to remove sample.
Evan



From vilanova at snf.stanford.edu  Mon Nov 25 11:04:14 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 25, 2002 11:04:14 AM
Subject: Problem headway2 2002-11-25 08:50:11: headway vac is always on
Message-ID: <mailman.210.1356281768.3914.headway2-pcs@snf.stanford.edu>

cleaned vacuum line, fitings , tested works ok
ready to use.