From vilanova at snf.stanford.edu Thu Oct 3 10:00:45 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 3, 2002 10:00:45 AM Subject: Shutdown headway2 2002-10-03 10:00:43: Weekly PM Message-ID: From vilanova at snf.stanford.edu Thu Oct 3 10:53:39 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 3, 2002 10:53:39 AM Subject: Shutdown headway2 2002-10-03 10:00:43: Weekly PM Message-ID: Weekly Pm Completed From seoung at snf.stanford.edu Sat Oct 5 04:13:29 2002 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Oct 5, 2002 4:13:29 PM Subject: Problem headway2 2002-10-05 16:13:26: Chuck doen't rotate Message-ID: The vacuum is good, but the chuck doen't rotate. When I used it before, the chuck didn't rotate smmothly in the low spin speed. But righ now, it doesn't rotate even in high speed. From vilanova at snf.stanford.edu Mon Oct 7 08:12:24 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 7, 2002 8:12:24 AM Subject: Problem headway2 2002-10-05 16:13:26: Chuck doen't rotate Message-ID: removed pothoresist from shaft , replaced fuse and tested Ok to use From vilanova at snf.stanford.edu Thu Oct 17 01:33:34 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 17, 2002 1:33:34 PM Subject: Shutdown headway2 2002-10-17 13:33:33: Weekly PM ....................... Message-ID: From vilanova at snf.stanford.edu Thu Oct 17 02:28:40 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 17, 2002 2:28:40 PM Subject: Shutdown headway2 2002-10-17 13:33:33: Weekly PM ....................... Message-ID: Weekly Pm completed From true at snf.stanford.edu Mon Oct 21 11:59:09 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Oct 21, 2002 11:59:09 AM Subject: Problem headway2 2002-10-21 11:58:43: chuck gone Message-ID: The headway chucks are in a very poor state. The one reliable chuck, it had no black o-ring and a white plastic disc, is gone. If someone has it, return it immediately. There is a brand new chuck with a white plastric disc but this one DOES NOT work with 4in wafers, the chuck part is too large. I tried to use a chuck with the black o-ring and it broke my 2nd wafer. These chucks have broke my wafers before. My wafers are completely standard, I'm not sure if the wafers break on the cchuck or from flying off. SNF staff and headway users, if you see that an important chuck is missing, please send out email so that users don't walk up to the machine thinking everything is OK. Even better, SNF staff, please make a list of necessary chucks, keep at least one spare, check at least every couple days to make sure that those chucks are still present, and if they are missing, pursue it by sending out email, replacing the missing chuck, and ordering another spare. It's not right to tell users they have to buy their own chucks, you should come up with a system that does not require that. From martinez at snf.stanford.edu Mon Oct 21 01:28:17 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 21, 2002 1:28:17 PM Subject: Problem headway2 2002-10-21 11:58:43: chuck gone Message-ID: available for use with other chucks From vilanova at snf.stanford.edu Thu Oct 31 07:35:28 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 31, 2002 7:35:28 AM Subject: Shutdown headway2 2002-10-31 07:35:27: weekly Pm Message-ID: Weekly Preventive maintenance In progress......... From vilanova at snf.stanford.edu Thu Oct 31 08:23:34 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 31, 2002 8:23:34 AM Subject: Shutdown headway2 2002-10-31 07:35:27: weekly Pm Message-ID: Weekly Preventive Maintenance Completed From huac at snf.stanford.edu Thu Oct 31 05:23:10 2002 From: huac at snf.stanford.edu (huac at snf.stanford.edu) Date: Oct 31, 2002 5:23:10 PM Subject: Problem headway2 2002-10-31 17:23:09: unable to spin wafer Message-ID: