Problem headway2 2002-10-05 16:13:26: Chuck doen't rotate

seoung at snf.stanford.edu seoung at snf.stanford.edu
Sat Oct 5 04:13:29 PDT 2002


The vacuum is good, but the chuck doen't rotate. When I used it before, the chuck didn't rotate smmothly in the low spin speed. But righ now, it doesn't rotate even in high speed.




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