Shutdown headway2 2002-10-31 07:35:27: weekly Pm
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Oct 31 07:35:28 PST 2002
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Problem headway2 2002-10-31 17:23:09: unable to spin wafer
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Shutdown headway2 2002-10-31 07:35:27: weekly Pm
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Weekly Preventive maintenance In progress.........
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Problem headway2 2002-10-31 17:23:09: unable to spin wafer
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Shutdown headway2 2002-10-31 07:35:27: weekly Pm
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