From true at snf.stanford.edu Mon Jan 6 06:52:41 2003 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Jan 6, 2003 6:52:41 PM Subject: Problem headway2 2003-01-06 18:52:40: still throwing wafers off chuck Message-ID: problem is worse with the chuck with the white flange. it seems like the vacuum is turning off too early. From vilanova at snf.stanford.edu Tue Jan 7 08:01:31 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 7, 2003 8:01:31 AM Subject: Problem headway2 2003-01-06 18:52:40: still throwing wafers off chuck Message-ID: The O -rings on Both of the new chucks ( the ones with the plastic covers) were dirty and they were not the righ ones ( They are to small) and thats why the vacuum wasnt working right. Replaced O rings , tested it ( 10 times! ) working ok. ready to use. From wittbrod at snf.stanford.edu Thu Jan 23 07:43:00 2003 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Jan 23, 2003 7:43:00 PM Subject: Problem headway2 2003-01-23 19:42:57: will not spin. this is a serious setback for me. I need to spin on polyimide as the first step in my process. I spent much time working to get reservations on the sts etcher and now I won't have th Message-ID: From wittbrod at snf.stanford.edu Thu Jan 23 08:05:26 2003 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Jan 23, 2003 8:05:26 PM Subject: Problem headway2 2003-01-23 20:05:24: headway not spinning. Other users thought there might be a fuse blown. Message-ID: From vilanova at snf.stanford.edu Fri Jan 24 07:52:40 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 24, 2003 7:52:40 AM Subject: Problem headway2 2003-01-23 19:42:57: will not spin. this is a serious setback for me. I need to spin on polyimide as the first step in my process. I spent much time working to get reservations on the sts etcher and now I won't have th Message-ID: Replaced Fuse, testedm , working ok From vilanova at snf.stanford.edu Fri Jan 24 07:53:06 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 24, 2003 7:53:06 AM Subject: Problem headway2 2003-01-23 20:05:24: headway not spinning. Other users thought there might be a fuse blown. Message-ID: Replaced burned Fuse , Tested , ok to use