Problem headway2 2003-01-06 18:52:40: still throwing wafers off chuck

vilanova at vilanova at
Tue Jan 7 08:01:31 PST 2003

The O -rings on Both of the new chucks ( the ones with the plastic covers) were dirty and they were not the righ ones ( They are to small) and thats why the vacuum wasnt working right.
Replaced O rings , tested it ( 10 times! ) working ok.
ready to use. 

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