Problem headway2 2003-01-06 18:52:40: still throwing wafers off chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jan 7 08:01:31 PST 2003

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The O -rings on Both of the new chucks ( the ones with the plastic covers) were dirty and they were not the righ ones ( They are to small) and thats why the vacuum wasnt working right.
Replaced O rings , tested it ( 10 times! ) working ok.
ready to use.

Previous message: Problem headway2 2003-01-06 18:52:40: still throwing wafers off chuck
Next message: Problem headway2 2003-01-23 19:42:57: will not spin. this is a serious setback for me. I need to spin on polyimide as the first step in my process. I spent much time working to get reservations on the sts etcher and now I won't have th
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