From vilanova at snf.stanford.edu  Mon Jun  2 07:51:24 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jun 2, 2003 7:51:24 AM
Subject: Shutdown headway2 2003-05-30 17:11:48: Report Clear for headway2
Message-ID: <mailman.246.1356281769.3914.headway2-pcs@snf.stanford.edu>

there was nothing wrong with the system , the problem was
that someone turned the switch off , i checked and ran a wafer
and everything is ok, ready to use.



From sandrews at snf.stanford.edu  Wed Jun  4 05:50:24 2003
From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu)
Date: Jun 4, 2003 5:50:24 AM
Subject: Shutdown headway2 2003-06-04 05:50:23: No vac
Message-ID: <mailman.247.1356281769.3914.headway2-pcs@snf.stanford.edu>

The vacuum line seems clogged.  The shaft spins even when no chuck is attached.



From vilanova at snf.stanford.edu  Wed Jun  4 08:24:10 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jun 4, 2003 8:24:10 AM
Subject: Shutdown headway2 2003-06-04 05:50:23: Report Clear for headway2
Message-ID: <mailman.248.1356281769.3914.headway2-pcs@snf.stanford.edu>

solder loose vacuum sensor wire , ok to use . :-) 



From alirezaa at snf.stanford.edu  Thu Jun 12 12:15:47 2003
From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu)
Date: Jun 12, 2003 12:15:47 PM
Subject: Shutdown headway2 2003-06-12 12:15:47: Report Shutdown for headway2
Message-ID: <mailman.249.1356281769.3914.headway2-pcs@snf.stanford.edu>

The vaccum is gone



From vilanova at snf.stanford.edu  Thu Jun 12 02:03:10 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jun 12, 2003 2:03:10 PM
Subject: Shutdown headway2 2003-06-12 12:15:47: Report Clear for headway2
Message-ID: <mailman.250.1356281769.3914.headway2-pcs@snf.stanford.edu>

found a lose wire , ok to use . 



From kallie at snf.stanford.edu  Thu Jun 26 12:19:28 2003
From: kallie at snf.stanford.edu (kallie at snf.stanford.edu)
Date: Jun 26, 2003 12:19:28 PM
Subject: Problem headway2 2003-06-26 12:19:26: Report Problem for headway2
Message-ID: <mailman.251.1356281769.3914.headway2-pcs@snf.stanford.edu>

chuck is pulling vac but isn't spinning



From vilanova at snf.stanford.edu  Thu Jun 26 02:50:02 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Jun 26, 2003 2:50:02 PM
Subject: Problem headway2 2003-06-26 12:19:26: Report Clear for headway2
Message-ID: <mailman.252.1356281769.3914.headway2-pcs@snf.stanford.edu>

replaced wet motor. tested , ok to use.



From uli at snf.stanford.edu  Fri Jun 27 10:58:34 2003
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Jun 27, 2003 10:58:34 AM
Subject: Shutdown headway2 2003-06-27 10:58:32: Report Shutdown for headway2
Message-ID: <mailman.253.1356281769.3914.headway2-pcs@snf.stanford.edu>

wbmiscres is filled up with water



From martinez at snf.stanford.edu  Fri Jun 27 01:07:55 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Jun 27, 2003 1:07:55 PM
Subject: Shutdown headway2 2003-06-27 10:58:32: Report Clear for headway2
Message-ID: <mailman.254.1356281769.3914.headway2-pcs@snf.stanford.edu>

no water damage ok to use