From sandrews at snf.stanford.edu Thu May 8 01:27:28 2003 From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu) Date: May 8, 2003 1:27:28 PM Subject: Problem headway2 2003-05-08 13:27:27: Wafer broke Message-ID: The vacuum was not maintained through entire spin-down. A wafer broke and was thrown from chuck. Please check the vacuum and solvent trap. From vilanova at snf.stanford.edu Thu May 8 02:52:54 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 8, 2003 2:52:54 PM Subject: Problem headway2 2003-05-08 13:27:27: Report Clear for headway2 Message-ID: preventive maintenance completed Please check the chucks before you use them some of them work fine while some others dont. ok to use. From sbank at snf.stanford.edu Sun May 18 09:30:22 2003 From: sbank at snf.stanford.edu (sbank at snf.stanford.edu) Date: May 18, 2003 9:30:22 PM Subject: Problem headway2 2003-05-18 21:30:21: Report Problem for headway2 Message-ID: Headway will not start spinning (vacuum, rpm monitor, and timer seem to be OK)... Maybe motor is broken? Also tried tuning accel adjust pot, but didn't solve problem. From vilanova at snf.stanford.edu Mon May 19 07:49:03 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 19, 2003 7:49:03 AM Subject: Problem headway2 2003-05-18 21:30:21: Report Clear for headway2 Message-ID: Replaced Blown Fuse, tested ok. ready to use. From kaimeifu at snf.stanford.edu Sun May 25 01:55:37 2003 From: kaimeifu at snf.stanford.edu (kaimeifu at snf.stanford.edu) Date: May 25, 2003 1:55:37 PM Subject: Problem headway2 2003-05-25 13:55:33: does not spin Message-ID: Could not get to spin. Vacuum seems fine. Tried both pieces cchucks and full wafer chucks. From dwshin at snf.stanford.edu Sun May 25 04:54:20 2003 From: dwshin at snf.stanford.edu (dwshin at snf.stanford.edu) Date: May 25, 2003 4:54:20 PM Subject: Problem headway2 2003-05-25 16:54:20: does not spin too Message-ID: I also checked with three different chucks. Definitely vaccuum is OK. From ofidaner at snf.stanford.edu Mon May 26 02:16:15 2003 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: May 26, 2003 2:16:15 PM Subject: Shutdown headway2 2003-05-26 14:16:15: Report Shutdown for headway2 Message-ID: It doesn't spin From martinez at snf.stanford.edu Tue May 27 10:15:35 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 27, 2003 10:15:35 AM Subject: Shutdown headway2 2003-05-26 14:16:15: Report Clear for headway2 Message-ID: replaced fuse, tested spin function, ready for use From martinez at snf.stanford.edu Tue May 27 10:16:00 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 27, 2003 10:16:00 AM Subject: Problem headway2 2003-05-25 16:54:20: Report Clear for headway2 Message-ID: replaced fuse. ok now From martinez at snf.stanford.edu Tue May 27 10:16:19 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 27, 2003 10:16:19 AM Subject: Problem headway2 2003-05-25 13:55:33: Report Clear for headway2 Message-ID: spins like a champ From vilanova at snf.stanford.edu Thu May 29 10:42:54 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 29, 2003 10:42:54 AM Subject: Shutdown headway2 2003-05-29 10:42:50: Report Shutdown for headway2 Message-ID: Weekly Pm From vilanova at snf.stanford.edu Thu May 29 10:43:08 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 29, 2003 10:43:08 AM Subject: Shutdown headway2 2003-05-29 10:42:50: Report Clear for headway2 Message-ID: wrong equipment From postrio at snf.stanford.edu Fri May 30 05:11:48 2003 From: postrio at snf.stanford.edu (postrio at snf.stanford.edu) Date: May 30, 2003 5:11:48 PM Subject: Shutdown headway2 2003-05-30 17:11:48: Report Shutdown for headway2 Message-ID: Vacuum is ok, but it doesn't spin. Motor burnt again?