From pcatryss at snf.stanford.edu  Fri Apr 30 09:29:26 2004
From: pcatryss at snf.stanford.edu (pcatryss at snf.stanford.edu)
Date: Fri, 30 Apr 2004 09:29:26 -0700
Subject: Problem headway2 2004-04-30 09:29:25: Vacuum weak for 6" wafers
Message-ID: <mailman.267.1356281769.3914.headway2-pcs@snf.stanford.edu>

Vacuum is a little weak for 6" wafers. I had a wafer almost spin out of orbit last night using one of the "big" chucks. Would it be possible to purchase some 6" chucks? This might also alleviate the problem.
Thanks,
Peter



From martinez at snf.stanford.edu  Fri Apr 30 10:37:53 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 30 Apr 2004 10:37:53 -0700
Subject: Problem headway2 2004-04-30 09:29:25: Vacuum weak for 6" wafers
Message-ID: <mailman.268.1356281769.3914.headway2-pcs@snf.stanford.edu>

you'll need to buy your own chuck - see mario