From me342b at snf.stanford.edu  Tue Aug  3 14:18:41 2004
From: me342b at snf.stanford.edu (me342b at snf.stanford.edu)
Date: Tue, 3 Aug 2004 14:18:41 -0700
Subject: Problem headway2 SNF 2004-08-03 14:18:41: chuck level
Message-ID: <mailman.283.1356281769.3914.headway2-pcs@snf.stanford.edu>

The spindle/chuck isn't level.  Resist runs towards the back side of the machine.



From vilanova at snf.stanford.edu  Tue Aug  3 14:55:30 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 3 Aug 2004 14:55:30 -0700
Subject: Problem headway2 SNF 2004-08-03 14:18:41: chuck level
Message-ID: <mailman.284.1356281769.3914.headway2-pcs@snf.stanford.edu>

chuck level adjusted, ok to  use. 



From schuller at snf.stanford.edu  Thu Aug 12 01:44:05 2004
From: schuller at snf.stanford.edu (schuller at snf.stanford.edu)
Date: Thu, 12 Aug 2004 01:44:05 -0700
Subject: Problem headway2 SNF 2004-08-12 01:44:04: vacuum on smaller chucks
Message-ID: <mailman.285.1356281769.3914.headway2-pcs@snf.stanford.edu>

I am processing on a 2 inch wafer. I could not get a decent vacuum on two out of the three smaller sized wafer chucks.



From vilanova at snf.stanford.edu  Thu Aug 12 07:40:47 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 12 Aug 2004 07:40:47 -0700
Subject: Problem headway2 SNF 2004-08-12 01:44:04: vacuum on smaller chucks
Message-ID: <mailman.286.1356281769.3914.headway2-pcs@snf.stanford.edu>

I've checked all the small chucks and every one of them 
works fine to me, I just cleaned them up.
Ok to use.